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J-GLOBAL ID：200902001862965610   Reference number：89A0122927

A microwave interferometer for density measurement and stabilization in process plasmas.

プロセスプラズマの密度測定と安定化のためのマイクロ波干渉計
Author (4)：
PEARSON D I C

About PEARSON D I C

(Plasma and Materials Technologies, Inc., CA, USA)

About Plasma and Materials Technologies, Inc., CA, USA

, 
CAMPBELL G A

About CAMPBELL G A

(Plasma and Materials Technologies, Inc., CA, USA)

About Plasma and Materials Technologies, Inc., CA, USA

, 
DOMIER C W

About DOMIER C W

(UCLA, CA, USA)

About UCLA, CA, USA

, 
EFTHIMION P C

About EFTHIMION P C

(Princeton Scientific Consultants, NJ, USA)

About Princeton Scientific Consultants, NJ, USA


Material：
Process Diagnostics: Materials, Combustion, Fusion  (Process Diagn Mater Combust Fusion)

About Process Diagnostics: Materials, Combustion, Fusion


Page： 311-317  Publication year： 1988 
JST Material Number： K19880905  ISBN： 0-931837-87-1  Document type： Proceedings
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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plasma phase synthesis

About plasma phase synthesis

,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Plasma diagnostics 
(BJ02090L)

About Plasma diagnostics

Terms in the title (5)：
Terms in the title
Keywords automatically extracted from the title.
プロセス

About プロセス

, 
プラズマ

About プラズマ

, 
密度測定

About 密度測定

, 
安定化

About 安定化

, 
マイクロ波干渉計

About マイクロ波干渉計


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