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J-GLOBAL ID:200902001864153567   Reference number:85A0024427

Advanced induction heating technology series.5.Application to the high-frequency electronic industry (in the field of semiconductors).

最新誘導加熱技術シリーズ V 高周波の電子工業への応用(半導体分野について)
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Issue: 16  Page: 65-72  Publication year: Jul. 1984 
JST Material Number: G0087B  ISSN: 0914-6733  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Manufacturing technology of solid-state devices  ,  Techniques and equipment of crystal growth  ,  Electric heating 
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