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ArticleJ-GLOBAL ID:200902001867920992整理番号:92A0416277

Comparison of CF3Cl and C2F6+Cl2 Plasma Chemistry by Power Modulation.

パワー変調によるCF3ClおよびC2F6+Cl2プラズマ化学の比較

著者:KISS L D B(Massachusetts Inst. Technology, Massachusetts)、SAWIN H H(Massachusetts Inst. Technology, Massachusetts)
資料名:J Electrochem Soc 巻:139 号:5 ページ:1414-1420
発行年:1992年05月
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About J-GLOBAL

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