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ArticleJ-GLOBAL ID:200902001868113683整理番号:91A0684834

Si結晶の熱処理過程と欠陥の形成

Defect formation in the cooling process after CZ-Si growth.

著者:篠山誠二(新日本製鉄 エレクトロニクス研)、長谷部政美(新日本製鉄 エレクトロニクス研)、山内剛(新日本製鉄 エレクトロニクス研)
資料名:応用物理 巻:60 号:8 ページ:766-773
発行年:1991年08月
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