Art
J-GLOBAL ID：200902001871968525   Reference number：88A0086567

Environmental facilities for ultraprecision machining.

超精密加工をおこなう施設環境
Author (1)：
YASUNAGA KOJI

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(清水建設)

About 清水建設


Material：
日本機械学会講演会講演論文集  (日本機械学会講演会講演概要集)

About 日本機械学会講演会講演論文集


Volume： 946th  Page： 54-58  Publication year： Oct. 1987 
JST Material Number： X0584A  Document type： Proceedings
Article type： 解説  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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precision machining

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,...
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JST classification (1)：
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Manufacturing technology of solid-state devices 
(NC03030V)

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Terms in the title (3)：
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精密加工

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, 
施設

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, 
環境

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