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ArticleJ-GLOBAL ID:200902001873671074整理番号:88A0601107

引上げ半導体結晶中の不純物濃度分布解析

Analysis of impurity concentration distribution in pulled semiconductor crystals.

著者:早川泰弘(静岡大 電子工研)、斉藤幸夫(静岡大 電子工研)、杉本祐司(静岡大 電子工研)・・・
資料名:静岡大学電子工学研究所研究報告 巻:23 号:1 ページ:21-33
発行年:1988年
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