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ArticleJ-GLOBAL ID:200902001875747221整理番号:87A0129165

Practical techniques for installing semiconductor processing equipment and troubleshooting particulate problems.

半導体処理装置の据付けと微粒子汚染問題の解決

著者:BEDINI T(Perkin‐Elmer Corp., USA)
資料名:Proceedings. Annual Technical Meeting and Exposition. Institute of Environmental Science and Technology 巻:32nd ページ:415-423
発行年:1986年
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J-GLOBAL: Linking, Expanding and Sparking

About J-GLOBAL

Linking

J-GLOBAL links information that represents the key to research and development. For example, linking articles and patents with people (authors and inventors) enables the extraction of a sequence of information.
It’s useful for making new discoveries and uncovering new information.

Expanding

The system enables searches of similar kinds of content through linkage with external sites.
It helps you to obtain knowledge from dissimilar fields and discover concepts that cross the boundaries of specialisms.

Sparking

Through repeated linkage and expansioniteration, J-GLOBAL provides unexpected hints for problem-solving and the illumination of new ideas.