Art
J-GLOBAL ID：200902001878145940   Reference number：92A0002874

Gettering of Cu at buried damage layers made by Si self implantation.

Author (4)：
LIEFTING J R

About LIEFTING J R

(FOM Inst. Atomic and Molecular Physics, Amsterdam, NLD)

About FOM Inst. Atomic and Molecular Physics, Amsterdam, NLD

, 
SCHREUTELKAMP R J

About SCHREUTELKAMP R J

(FOM Inst. Atomic and Molecular Physics, Amsterdam, NLD)

About FOM Inst. Atomic and Molecular Physics, Amsterdam, NLD

, 
LU W X

About LU W X

(FOM Inst. Atomic and Molecular Physics, Amsterdam, NLD)

About FOM Inst. Atomic and Molecular Physics, Amsterdam, NLD

, 
SARIS F W

About SARIS F W

(FOM Inst. Atomic and Molecular Physics, Amsterdam, NLD)

About FOM Inst. Atomic and Molecular Physics, Amsterdam, NLD


Material：
Beam-Solid Interactions: Physical Phenomena  (Beam-Solid Interact Phys Phenom)

About Beam-Solid Interactions: Physical Phenomena


Page： 641-646  Publication year： 1990 
JST Material Number： K19910616  ISBN： 1-55899-045-3  Document type： Proceedings
Country of issue： United States (USA)  Language： ENGLISH (EN)
Terms in the title (2)：
Terms in the title
Keywords automatically extracted from the title.
Cu

About Cu

, 
Si

About Si


Return to Previous Page

TOP

BOTTOM