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ArticleJ-GLOBAL ID:200902001886929526整理番号:87A0438423

The role of ion/surface interactions and photo-induced reactions during film growth from the vapor phase.

蒸気相からのフィルム成長の際のイオン/表面相互作用と光誘起反応の役割

著者:GREENE J E(Univ. Illinois, IL, USA)、MOTOOKA T(Univ. Illinois, IL, USA)、SUNDGREN J‐E(Univ. Illinois, IL, USA)・・・
資料名:Nucl Instrum Method Phys Res Sect B Beam Interact Mater At 巻:27 号:1 ページ:226-242
発行年:1987年06月
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