Art
J-GLOBAL ID：200902001892052210   Reference number：91A0046182

On the formation of new materials by IVD (Ion Vapour Deposition) technique.

IVD法による新材料合成の研究
Author (4)：
ANDO YASUNORI

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(日新電機)

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, 
OGATA KIYOSHI

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(日新電機)

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, 
MATSUMURA NORIAKI

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(日新電機)

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, 
KAMIJO EIJI

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(日新電機)

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Material：
日新電機技報  (Nissin Electric Review)

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Volume： 32  Issue： 2  Page： 45-50  Publication year： Apr. 1987 
JST Material Number： S0817B  ISSN： 0549-5377  CODEN： NIDGA  Document type： Article
Article type： 解説  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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thin film growth

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Techniques and equipment of thin film deposition 
(BK14020I)

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新材料

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, 
研究

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