Art
J-GLOBAL ID:200902001892209756   Reference number:89A0339233

Epitaxial growth and characterization of Si/NiSi2/Si(111) heterostructures.

Si/NiSi2/Si(111)ヘテロ構造のエピタキシャル成長と評価
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Material:
Volume: 211/212  Page: 620-629  Publication year: Apr. 1989 
JST Material Number: C0129B  ISSN: 0039-6028  Document type: Article
Article type: 原著論文  Country of issue: Netherlands (NLD)  Language: ENGLISH (EN)
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Semiconductor thin films  ,  半導体-半導体接触【’81~’92】 
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