Rare metal.Basic research on So<sub>x</sub> gas sensor using beta alumina sputtered with rare earth oxide.

YAO SHIN'YA; MIYAKAWA KENJI; KOZUKA ZENSAKU

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J-GLOBAL ID：200902001893006689 Reference number：93A0001199

Rare metal.Basic research on So_x gas sensor using beta alumina sputtered with rare earth oxide.

レア・メタル希土類酸化物をスパッタしたベータアルミナを用いたSo_xガスセンサに関する基礎的研究

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Volume： 1992 Issue： F.O Page： 21-24 Publication year： 1992
JST Material Number： S0387B ISSN： 0919-7915 Document type： Proceedings
Article type：短報 Country of issue： Japan (JPN) Language： JAPANESE (JA)

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Properties of ceramics and ceramic whiteware , Analytical instruments

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Rare metal.Basic research on Sox gas sensor using beta alumina sputtered with rare earth oxide.

Rare metal.Basic research on So_x gas sensor using beta alumina sputtered with rare earth oxide.