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ArticleJ-GLOBAL ID:200902001908791299整理番号:84A0046218

Origin of blistering observed on forming-gas-annealed Ti/Pt ohmic contacts.

フォーミングガス焼なましを行ったTi/Ptオーム接触に見られるブリスタリングの起源

著者:HENEIN G(Bell Lab., NJ)
資料名:Thin Solid Films 巻:109 号:2 ページ:115-125
発行年:1983年11月11日
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