Art
J-GLOBAL ID：200902001908893091
Reference number：91A0072857
Fabrication of BESOI-materials using implanted nitrogen as an effective etch stop barrier.
注入窒素を使用した効果的なエッチストップ障壁としてのBESOI材料の製造
-
Publisher site
Copy service
{{ this.onShowCLink("http://jdream3.com/copy/?sid=JGLOBAL&noSystem=1&documentNoArray=91A0072857©=1") }}
-
Access JDreamⅢ for advanced search and analysis.
{{ this.onShowJLink("http://jdream3.com/lp/jglobal/index.html?docNo=91A0072857&from=J-GLOBAL&jstjournalNo=K19901039") }}
Author (1)：
Material：
Page：
64-65
Publication year：
1989
JST Material Number：
K19901039
Document type：
Proceedings
Article type：
短報
Country of issue：
United States (USA)
Language：
ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
,...
JST classification (1)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices
Terms in the title (5)：
Terms in the title
Keywords automatically extracted from the title.
,
,
,
,
Return to Previous Page
