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J-GLOBAL ID:200902001909053550   Reference number:84A0382245

High-temperature wafer prober predicts yield problems early.

歩留り問題を早期に予測する高温ウエハプローバ
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Volume: 57  Issue:Page: 141-144  Publication year: May. 03, 1984 
JST Material Number: B0455B  ISSN: 0013-5070  CODEN: ELECA  Document type: Article
Article type: 解説  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Measurement,testing and reliability of solid-state devices 
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