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J-GLOBAL ID:200902001909614269   Reference number:84A0407228

Laser doping: bipolar structures in silicon.

レーザドーピング:シリコンのバイポーラ構造
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Volume: 16  Issue:Page: 37-39  Publication year: Feb. 1984 
JST Material Number: D0245B  ISSN: 0030-3992  Document type: Article
Article type: 原著論文  Country of issue: Netherlands (NLD)  Language: ENGLISH (EN)
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Laser irradiation effects and damages  ,  Manufacturing technology of solid-state devices  ,  Lattice defects in semiconductors 
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