Enhancement of sliding life of MoS<sub>2</sub> films deposited by combining sputtering and high-energy ion implantation.

CHEVALLIER J; OLESEN S; SO RENSEN G; GUPTA B

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J-GLOBAL ID：200902001910382835 Reference number：86A0358148

Enhancement of sliding life of MoS₂ films deposited by combining sputtering and high-energy ion implantation.

スパッタリング法と高エネルギーイオン注入法を組合せて作ったMoS₂膜のすべり寿命の改善

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Volume： 48 Issue： 13 Page： 876-877 Publication year： Mar. 31, 1986
JST Material Number： H0613A ISSN： 0003-6951 CODEN： APPLAB Document type： Article
Article type：短報 Country of issue： United States (USA) Language： ENGLISH (EN)

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Lubricating method , Mechanical properties of solids in general , Thin films of other inorganic compounds

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Enhancement of sliding life of MoS2 films deposited by combining sputtering and high-energy ion implantation.

Enhancement of sliding life of MoS₂ films deposited by combining sputtering and high-energy ion implantation.