Art
J-GLOBAL ID:200902001912685533
Reference number:89A0115879
Defektdichte und Oberflaechenkontamination im μm Bereich in der Halbleiterspeicherproduktion.
半導体メモリの製造における格子欠陥密度と表面汚染
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Author (2):
,
Material:
Issue:
693
Page:
225-228
Publication year:
1988
JST Material Number:
H0299A
ISSN:
0083-5560
Document type:
Article
Article type:
原著論文
Country of issue:
Germany, Federal Republic of (DEU)
Language:
GERMAN (DE)
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JST classification (1):
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices
Terms in the title (4):
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,
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