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ArticleJ-GLOBAL ID:200902001913337032整理番号:90A0454996

イオン注入法による圧力センサ用窒化シリコン薄膜の機械的物性制御

Control of mechanical properties of silicon nitride thin films for pressure sensor by ion implantation technique.

著者:田畑修(豊田中研)、杉山進(豊田中研)、瀧川光治(豊田中研)・・・
資料名:電気学会論文誌 C 巻:110 号:4 ページ:228-234
発行年:1990年04月
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