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J-GLOBAL ID:200902001923311228   Reference number:89A0569399

High temperature absorption coefficients of O2, NH3 and H2O for broadband ArF excimer laser radiation.

広帯域ArFエキシマレーザ放射に対するO2,NH3およびH2Oの高温での吸収係数
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Volume: 42  Issue:Page: 267-278  Publication year: Oct. 1989 
JST Material Number: H0072A  ISSN: 0022-4073  Document type: Article
Article type: 原著論文  Country of issue: United Kingdom (GBR)  Language: ENGLISH (EN)
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Visible and ultraviolet spectra of inorganic molecules 

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