Art
J-GLOBAL ID:200902001924398262   Reference number:86A0310582

Sample preparation technique for delineating interfacial films on device multilayer structures.

多層構造素子の界面膜の輪郭を画くための試料準備法
Material:
Volume: 28  Issue:Page: 1753-1754  Publication year: Sep. 1985 
JST Material Number: E0292B  ISSN: 0018-8689  CODEN: IBMTA  Document type: Article
Article type: 解説  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Measurement,testing and reliability of solid-state devices 
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