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ArticleJ-GLOBAL ID:200902001925884233整理番号:90A0177734

Thermal stability of WSiN-GaAs and Au-WSiN interfaces.

WSiN‐GaAsとAu‐WSiN界面の熱的安定性

著者:SUGAHARA H(NTT LSI Lab., Kanagawa, JPN)、NAGANO J(NTT LSI Lab., Kanagawa, JPN)
資料名:Appl Surf Sci 巻:41/42 ページ:207-211
発行年:1989年11月
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