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J-GLOBAL ID:200902001929286306   Reference number:88A0159999

Current status of SOI devices.

SOIデバイスの現状
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Material:
Volume: 87  Issue: 344  Page: 25-32(SDM87-167)  Publication year: Jan. 26, 1988 
JST Material Number: S0532B  ISSN: 0913-5685  Document type: Proceedings
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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金属-絶縁体-半導体構造【’81~’92】  ,  General 
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