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ArticleJ-GLOBAL ID:200902001950246098整理番号:91A0565924

表面波プラズマの発生とその応用

Production and Application of Surface-Wave-Produced Plasmas.

著者:小町恭一(住友金属工業)、小林純夫(住友金属工業)
資料名:住友金属 巻:43 号:4 ページ:50-57
発行年:1991年05月
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About J-GLOBAL

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