Art
J-GLOBAL ID：200902001951116279
Reference number：91A0242556
Исследование диффузии в тонких пленках Au/Pd/Ti,Au/Pd/Cr/Ti на кремнии.
シリコン上のAu/Pd/Ti,Au/Pd/Cr/Ti薄膜における拡散
Author (6)：
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Material：
Volume：
26
Issue：
12
Page：
2461-2466
Publication year：
Dec. 1990
JST Material Number：
R0254A
CODEN：
IVNMA
Document type：
Article
Article type：
原著論文
Country of issue：
USSR (SUN)
Language：
RUSSIAN (RU)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Diffusion in solids in general
Terms in the title (7)：
Terms in the title
Keywords automatically extracted from the title.
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