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ArticleJ-GLOBAL ID:200902001957915351整理番号:88A0021665

気相反応法によるSiC超微粒子の合成

Synthesis of silicon carbide (SiC) ultrafine particles by gas phase reaction method.

著者:馬場日男(群馬大 工)、茂木昌巳(群馬大 工)、定方正毅(群馬大 工)・・・
資料名:化学工学協会年会研究発表講演要旨集 巻:52nd ページ:565
発行年:1987年03月
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