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ArticleJ-GLOBAL ID:200902001960757422整理番号:93A0455489

Investigation of the early stages of diamond film growth by ellipsometric monitoring.

エリプソメトリーモニタリングによるダイヤモンド膜成長の初期段階の研究

著者:HAYASHI Y(ULVAC Japan Ltd., Tsukuba, JPN)、HIBINO Y(ULVAC Japan Ltd., Tsukuba, JPN)
資料名:Surf Coat Technol 巻:54/55 号:1/3 Pt 2 ページ:414-417
発行年:1992年11月23日
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About J-GLOBAL

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The system enables searches of similar kinds of content through linkage with external sites.
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