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ArticleJ-GLOBAL ID:200902001967062667整理番号:92A0428079

X-Ray Diagnostics of 2D Deformation Profiles in Crystals with Periodically Distorted Near-Surface Region.

周期的に変形した近表面領域を持つ結晶の二次元ひずみ分布のX線診断

著者:GOUREEV T E(Inst. Microelectronics Technology and Purity Materials, Russian Academy of Sciences, Chernogolovka)、NIKULIN A YU(Inst. Microelectronics Technology and Purity Materials, Russian Academy of Sciences, Chernogolovka)、PETRASHEN P V(Inst. Microelectronics Technology and Purity Materials, Russian Academy of Sciences, Chernogolovka)
資料名:Phys Status Solidi A 巻:130 号:2 ページ:263-271
発行年:1992年04月
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