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ArticleJ-GLOBAL ID:200902001979442171整理番号:92A0197867

ECRプラズマスパッタリング法によるチタン酸ビスマス膜の作製と光学特性

Preparation and Optical Properties of Bismuth Titanate Films by ECR Plasma Sputtering.

著者:増本博(東北大 金材研)、後藤孝(東北大 金材研)、増田陽一郎(八戸工大)・・・
資料名:粉体および粉末冶金 巻:39 号:2 ページ:109-112
発行年:1992年02月
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