Improvement on characteristics of cobalt alloy and carbon sputtering targets for magnetic media production.

YOSHIKAWA K; MIYAMOTO T

Art

J-GLOBAL ID：200902001983257389 Reference number：90A0600409

Improvement on characteristics of cobalt alloy and carbon sputtering targets for magnetic media production.

磁気メディア生産用コバルト合金および炭素スパッタリングターゲットの特性の改善

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Issue： 8 Page： 9-13 Publication year： Jun. 1990
JST Material Number： L0512A ISSN： 0913-4794 Document type： Article
Country of issue： Japan (JPN) Language： ENGLISH (EN)

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