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ArticleJ-GLOBAL ID:200902001983257389整理番号:90A0600409

Improvement on characteristics of cobalt alloy and carbon sputtering targets for magnetic media production.

磁気メディア生産用コバルト合金および炭素スパッタリングターゲットの特性の改善

著者:YOSHIKAWA K(Kobe Steel Ltd., Hyogo, JPN)、MIYAMOTO T(Kobe Steel Ltd., Hyogo, JPN)
資料名:Kobelco Technol Rev 号:8 ページ:9-13
発行年:1990年06月
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About J-GLOBAL

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