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ArticleJ-GLOBAL ID:200902001990127989整理番号:92A0586497

プラズマ環境の計測システム シースを補償した静電探針法

Instrumentation System for Plasma Environment. Electric Probe with Compensation for Time-Dependent Sheath.

著者:加藤征三(三重大 工)、丸山直樹(三重大 工)、川口博志(日本碍子)・・・
資料名:日本機械学会東海支部地区講演会講演論文集 巻:1992 号:Mie ページ:259-262
発行年:1992年07月
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