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J-GLOBAL ID:200902001990614731   Reference number:93A0722481

Amorphous-to-crystalline transformation and metal induced crystallization phenomena in a-Si:F and a-Si:D:H thin films.

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Material:
Page: 75-80  Publication year: 1992 
JST Material Number: K19930408  ISBN: 1-55899-097-6  Document type: Proceedings
Country of issue: United States (USA)  Language: ENGLISH (EN)
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