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ArticleJ-GLOBAL ID:200902001992039386整理番号:82A0362570

A computational and experimental analysis of fifth-order deflection aberrations.

5次の偏向収差の数値分析と実験研究

著者:RAO V R M(Cambridge Univ.)、NIXON W C(Cambridge Univ.)
資料名:J Vac Sci Technol 巻:19 号:4 ページ:1037-1041
発行年:1981年11月
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