Art
J-GLOBAL ID：200902001995770120
Reference number：91A0588496
Absolute measurement of net-excitation rate in an RF glow discharge.
RFグロー放電中の励起レートの絶対測定
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Author (5)：
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Material：
Volume：
38th
Issue：
Pt 1
Page：
16
Publication year：
Mar. 1991
JST Material Number：
Y0054A
Document type：
Proceedings
Country of issue：
Japan (JPN)
Language：
JAPANESE (JA)
Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
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