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ArticleJ-GLOBAL ID:200902002003819633整理番号:86A0353905

Effects of rf bias on the superconducting and structural properties of rf magnetron sputtered NbN.

rfマグネトロン・スパッタNbNの超伝導と構造の性質へのrfバイアスの効果

著者:CARTER W L(Naval Research Lab., Washington DC)、CUKAUSKAS E J(Naval Research Lab., Washington DC)、QADRI S B(Naval Research Lab., Washington DC)・・・
資料名:J Appl Phys 巻:59 号:8 ページ:2905-2907
発行年:1986年04月15日
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