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ArticleJ-GLOBAL ID:200902002004265178整理番号:85A0015095

Optimization of high brightness Cs ion source and ion optics for UHV-IMMA.

超高真空イオンマイクロプローブ質量分析計のための高輝度Csイオン源及びイオン光学系の最適化

著者:KOMATSU K(ULVAC Corp., Chigasaki)、TSUKAKOSHI O(ULVAC Corp., Chigasaki)、KATAGAWA T(ULVAC Corp., Chigasaki)・・・
資料名:Second Ion Mass Spectrom ページ:124-126
発行年:1984年
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About J-GLOBAL

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