Art
J-GLOBAL ID:200902002021483421   Reference number:91A0560813

Effect of a funnel shaped structure inserted in a Si CZ furnace on its characteristics.

Si Cz炉内挿入物の炉特性への影響
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Material:
Volume: 28th  Issue: Pt 2  Page: 643-645  Publication year: 1991 
JST Material Number: F0872C  Document type: Proceedings
Article type: 短報  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Crystallization 
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