Art
J-GLOBAL ID：200902002035388073
Reference number：88A0402421
Optical profile analysis of diffused and ion-implanted silicon.
拡散およびイオン注入したけい素の光学的プロファイル解析
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Author (4)：
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Material：
Volume：
105
Issue：
2
Page：
627-635
Publication year：
Feb. 1988
JST Material Number：
D0774A
ISSN：
0031-8965
Document type：
Article
Article type：
原著論文
Country of issue：
Germany, Federal Republic of (DEU)
Language：
ENGLISH (EN)
Thesaurus term：
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Irradiational changes semiconductors
, Optical properties of condensed matter in general
Terms in the title (6)：
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Keywords automatically extracted from the title.
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