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ArticleJ-GLOBAL ID:200902002038062080整理番号:92A0057462

Monitoring downstream particles in a single-wafer CVD oxide reactor.

一葉ウエハCVD酸化膜反応器中の下流での粒子モニタ

著者:STERN J E(IBM General Technology Division, VT)、DOPP D J(IBM General Technology Division, NY)、WU J J(IBM Advanced Semiconductor Technology Center, NY)
資料名:Microcontamination 巻:9 号:11 ページ:17-19,56
発行年:1991年11月
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J-GLOBAL: Linking, Expanding and Sparking

About J-GLOBAL

Linking

J-GLOBAL links information that represents the key to research and development. For example, linking articles and patents with people (authors and inventors) enables the extraction of a sequence of information.
It’s useful for making new discoveries and uncovering new information.

Expanding

The system enables searches of similar kinds of content through linkage with external sites.
It helps you to obtain knowledge from dissimilar fields and discover concepts that cross the boundaries of specialisms.

Sparking

Through repeated linkage and expansioniteration, J-GLOBAL provides unexpected hints for problem-solving and the illumination of new ideas.