Art
J-GLOBAL ID:200902002042351940
Reference number:93A0126340
Needs for super-smooth surfaces.
Author (1):
Material:
Volume:
1720
Page:
2-10
Publication year:
1992
JST Material Number:
D0943A
ISSN:
0277-786X
CODEN:
PSISDG
Document type:
Proceedings
Country of issue:
United States (USA)
Language:
ENGLISH (EN)
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