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ArticleJ-GLOBAL ID:200902002049394378整理番号:87A0185419

Ambient dependence of metal diffusion through a less-electronegative metal layer.

電気陰性度がより小さい金属層を通過する金属拡散の環境依存性

著者:CHANG C‐A(IBM T.J. Watson Research Center, NY, USA)、YEH H L(IBM T.J. Watson Research Center, NY, USA)
資料名:Appl Phys Lett 巻:49 号:19 ページ:1233-1235
発行年:1986年11月10日
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