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ArticleJ-GLOBAL ID:200902002056317869整理番号:91A0392817

A micron scale Faraday cup for electron beam current measurements.

電子線の電流測定のためのミクロンスケールのFaradyカップ

著者:BHATTACHARYA P K(Microelectronics Center of North Carolina, North Carolina)、MAYNARD L(Microelectronics Center of North Carolina, North Carolina)
資料名:J Vac Sci Technol A 巻:9 号:2 ページ:364-368
発行年:1991年03月
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About J-GLOBAL

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