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ArticleJ-GLOBAL ID:200902002072696667整理番号:92A0000012

クラスターイオンビーム蒸着法による酸化インジウム膜の生成

Preparation of indium oxide film by cluster ion beam deposition.

著者:三尾淳(東京都工技セ)、仁平宣弘(東京都工技セ)、藤井康之(芝浦工大)・・・
資料名:表面技術協会講演大会講演要旨集 巻:83rd ページ:25-26
発行年:1991年03月
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