Art
J-GLOBAL ID:200902002076933760   Reference number:88A0177574

Removal of silane gas by absorption into alkaline solutions: Alkaline hydrolysis of silane.

アルカリ溶液への吸収によるシランガスの除去 シランのアルカリ加水分解
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Material:
Volume: 57  Issue: 1/6  Page: 95-104  Publication year: Jul. 1987 
JST Material Number: D0482A  ISSN: 0098-6445  CODEN: CEGCAK  Document type: Article
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Absorption 
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