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J-GLOBAL ID:200902002080675954   Reference number:83A0179641

Investigation of glasses using surface profiling by spectrochemical analysis of sputter-induced radiation: I, Surface profiling technique with high in-depth resolution.

スパッタ誘導放射のスペクトル分析による表面像を用いたガラスの研究 I 深さ解像度の高い表面分析法
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Material:
Volume: 65  Issue: 11  Page: 527-533  Publication year: Nov. 1982 
JST Material Number: C0253A  ISSN: 0002-7820  CODEN: JACTAW  Document type: Article
Article type: 文献レビュー  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Properties,analysis and test of glass 
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