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ArticleJ-GLOBAL ID:200902002080675954整理番号:83A0179641

Investigation of glasses using surface profiling by spectrochemical analysis of sputter-induced radiation: I, Surface profiling technique with high in-depth resolution.

スパッタ誘導放射のスペクトル分析による表面像を用いたガラスの研究 I 深さ解像度の高い表面分析法

著者:BACH H(Schott Glaswerke, Federal Republic of Germany)、BAUCKE F G K(Schott Glaswerke, Federal Republic of Germany)
資料名:J Am Ceram Soc 巻:65 号:11 ページ:527-533
発行年:1982年11月
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