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ArticleJ-GLOBAL ID:200902002083628817整理番号:90A0666720

減圧CVD法による膜形成の分子論的研究

Molecular theory on growth rate of films produced by the low-pressure CVD method.

著者:南部健一(東北大 流体科研)、五十嵐三武郎(東北大 流体科研)、渡部安雄(東北大 流体科研)
資料名:東北大学流体科学研究所報告 巻:1 ページ:39-48
発行年:1990年03月
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