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ArticleJ-GLOBAL ID:200902002087229950整理番号:90A0083880

Structure and properties of metallic Sn-Zn alloy films prepared by plasma-enhanced metalorganic chemical vapor deposition.

プラズマ促進有機金属化学蒸着により作製した金属性のSn‐Zn合金膜の構造と性質

著者:LIN T J(Univ. Missouri‐Rolla, MO, USA)、O’KEEFE T J(Univ. Missouri‐Rolla, MO, USA)、JAMES W J(Univ. Missouri‐Rolla, MO, USA)
資料名:Thin Solid Films 巻:177 ページ:271-286
発行年:1989年10月
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