Art
J-GLOBAL ID：200902002097460064   Reference number：84A0260968

On the measurement of film thickness by a polarization interferometer.

偏光干渉による膜厚測定
Author (3)：
CHITNIS V T

About CHITNIS V T

(Nagoya Univ.)

About Nagoya Univ.

, 
UCHIDA Y

About UCHIDA Y

(Nagoya Univ.)

About Nagoya Univ.

, 
HATTORI S

About HATTORI S

(Nagoya Univ.)

About Nagoya Univ.


Material：
Transactions of the Institute of Electronics and Communication Engineers of Japan Section E (English)  (Trans Inst Electron Commun Eng Jpn Sect E)

About Transactions of the Institute of Electronics and Communication Engineers of Japan Section E (English)


Volume： 66  Issue： 11  Page： 649-652  Publication year： Nov. 1983 
JST Material Number： F0699B  ISSN： 0387-236X  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)
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film thickness

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,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Measuring methods and instruments of length,area,cross section,volume,angle 
(AD05020O)

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Terms in the title (2)：
Terms in the title
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偏光干渉

About 偏光干渉

, 
膜厚測定

About 膜厚測定


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