Art
J-GLOBAL ID：200902015477816621   Reference number：88A0009143

Potential of optical lithography.

光リソグラフィーの可能性
Author (1)：
NAKASE M

About NAKASE M

(Toshiba Corp., Kawasaki-city, JPN)

About Toshiba Corp., Kawasaki-city, JPN


Material：
Optical Engineering  (Opt Eng)

About Optical Engineering


Volume： 26  Issue： 4  Page： 319-324  Publication year： Apr. 1987 
JST Material Number： B0577B  ISSN： 0091-3286  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
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lithography

About lithography

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
optical lithography

About optical lithography

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

,  Applications of lasers 
(BD04100V)

About Applications of lasers

Terms in the title (2)：
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光リソグラフィー

About 光リソグラフィー

, 
可能性

About 可能性


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