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ArticleJ-GLOBAL ID:200902015478365585整理番号:89A0160090

New technique and analysis of accelerated electromigration life testing in multilevel metallizations.

多段メタライゼーション構造の電界移動の加速寿命試験の新しい方法と解析

著者:MURAY L P(Cornell Univ., NY, USA)、RATHBUN L C(Cornell Univ., NY, USA)、WOLF E D(Cornell Univ., NY, USA)
資料名:Appl Phys Lett 巻:53 号:15 ページ:1414-1416
発行年:1988年10月10日
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